{"id":74,"date":"2026-10-05T20:14:54","date_gmt":"2026-10-05T12:14:54","guid":{"rendered":"http:\/\/runda-hitech.com\/?page_id=74"},"modified":"2026-10-05T21:09:37","modified_gmt":"2026-10-05T13:09:37","slug":"semiconductor","status":"publish","type":"page","link":"https:\/\/runda-hitech.com\/index.php\/applications\/semiconductor\/","title":{"rendered":"Semiconductor &#038; High-Purity Gas Valves"},"content":{"rendered":"\n<div class=\"wp-block-cover alignfull rlok-hero\" style=\"min-height:430px;aspect-ratio:unset;\"><span aria-hidden=\"true\" class=\"wp-block-cover__background has-background-dim\"><\/span><img decoding=\"async\" class=\"wp-block-cover__image-background\" alt=\"\" src=\"http:\/\/runda-hitech.com\/wp-content\/uploads\/2026\/10\/r-lok-hero-background.jpg\" data-object-fit=\"cover\"\/><div class=\"wp-block-cover__inner-container has-global-padding is-layout-constrained wp-block-cover-is-layout-constrained\">\n<h1 class=\"wp-block-heading\">Semiconductor &amp; High-Purity Gas Valves<\/h1>\n\n\n\n<p class=\"wp-block-paragraph\">High-purity systems carry nitrogen, argon, helium, hydrogen, specialty gases and process chemicals from bulk supply to the point of use without adding particles, moisture or hydrocarbons. R-LOK supplies UHP diaphragm valves in SS316L and SS316L VAR, weld fittings, VCR gasket face seal connectors, regulators and sintered stainless filters. Passages are electropolished to Ra 0.13 um (5 uin.); valves are rated to 3,000 psig (207 bar).<\/p>\n\n\n\n<div class=\"wp-block-buttons is-layout-flex wp-block-buttons-is-layout-flex\">\n<div class=\"wp-block-button\"><a class=\"wp-block-button__link wp-element-button\" href=\"\/index.php\/contact\/\">Request a quote<\/a><\/div>\n\n<div class=\"wp-block-button is-style-outline\"><a class=\"wp-block-button__link wp-element-button\" href=\"\/index.php\/products\/\">Browse products<\/a><\/div>\n<\/div>\n<\/div><\/div>\n\n\n\n<div class=\"wp-block-group rlok-body has-global-padding is-layout-constrained wp-container-core-group-is-layout-b8954cbe wp-block-group-is-layout-constrained\" style=\"border-radius:0px\">\n<p class=\"wp-block-paragraph\"><span class=\"rlok-fallback-nav\"><a href=\"\/index.php\/products\/\">Products<\/a> &nbsp;&middot;&nbsp; <a href=\"\/index.php\/applications\/\">Applications<\/a> &nbsp;&middot;&nbsp; <a href=\"\/index.php\/quality\/\">Quality<\/a> &nbsp;&middot;&nbsp; <a href=\"\/index.php\/resources\/\">Resources<\/a> &nbsp;&middot;&nbsp; <a href=\"\/index.php\/about\/\">About<\/a> &nbsp;&middot;&nbsp; <a href=\"\/index.php\/contact\/\">Contact<\/a><\/span><\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><span class=\"rlok-bc\"><a href=\"\/index.php\/\">Home<\/a> &rsaquo; <a href=\"\/index.php\/applications\/\">Applications<\/a> &rsaquo; <strong>Semiconductor<\/strong><\/span><\/p>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-6ac5c474 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<h3 class=\"wp-block-heading\">Key features<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>UHP diaphragm valves rated to 3,000 psig (207 bar) with metal diaphragm isolation.<\/li>\n\n<li>Bodies in SS316L, ASTM A479 bar or SS316L VAR to SEMI F20-0305.<\/li>\n\n<li>Finishes BA Ra 0.25 um (10 uin.) and EP Ra 0.13 um (5 uin.)<\/li>\n\n<li>Leakage 1 x 10^-9 std cm^3\/s helium, internal and external.<\/li>\n\n<li>Filter pore grades 0.5, 2, 7, 15, 60 and 90 micron.<\/li>\n\n<li>RH regulators: SS316L body, 10 um inlet screen, 500 to 6,000 psig.<\/li>\n<\/ul>\n<\/div>\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<h3 class=\"wp-block-heading\">Specifications<\/h3>\n\n\n\n<figure class=\"wp-block-table is-style-stripes\"><table><thead><tr><th>Parameter<\/th><th>Value<\/th><\/tr><\/thead><tbody><tr><td>Product scope<\/td><td>UHP diaphragm valves and manifolds, weld fittings, VCR connectors, regulators, inline filters<\/td><\/tr><tr><td>End connections<\/td><td>VCR thread, GBO-LOK compression fitting, tube butt weld, NPT per ASME B1.20.1<\/td><\/tr><tr><td>Diaphragm valve sizes<\/td><td>1\/4 in, 3\/8 in and 1\/2 in (6-12 mm); LD series also 3\/4 in<\/td><\/tr><tr><td>Diaphragm valve pressure<\/td><td>LD to 250 psig (17.2 bar); HD to 3,000 psig (207 bar) by series<\/td><\/tr><tr><td>Weld fitting sizes<\/td><td>1\/8 in to 1 in (6-18 mm) tube outside diameter, imperial and metric tables<\/td><\/tr><tr><td>Weld fitting pressure<\/td><td>8,500 psi (586 bar) at 0.028 in wall; 3,700 psi (254 bar) at 0.049 in wall; 2,400 psi (165 bar) on 3\/4 in and 1 in<\/td><\/tr><tr><td>Materials and seats<\/td><td>bodies SS316L, ASTM A479 or VAR; diaphragms SS316L or Hastelloy C-22; seats PCTFE, PFA or Vespe<\/td><\/tr><tr><td>Seat temperature<\/td><td>PCTFE -40 to 176 F (-40 to 80 C); PFA and Vespe to 350 F (177 C)<\/td><\/tr><\/tbody><\/table><\/figure>\n<\/div>\n<\/div>\n\n\n\n<h2 class=\"wp-block-heading\">Where it is used<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">A fab gas system is a chain of pressure and purity stages: panel, distribution tubing, valve manifold box or gas cabinet, then the tool gas stick that feeds the process chamber. A regulator drops the pressure there and a filter removes particulate.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Every joint is a potential particle source. High-purity systems use welded tubing runs, metal gasket face seals at joints reopened for maintenance, and diaphragm valves. R-LOK supplies UHP components for all these stages, from 1\/4 in to 3\/4 in (6-12 mm) port sizes.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">How to specify it<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">Pressure rating is not the deciding factor. Two valves of the same size and the same 316L body can differ by an order of magnitude in particles released, internal volume, and leak rate after thermal cycling.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">A diaphragm valve presses a flexible metal diaphragm onto a seat enclosed in the body. The media never touches a packing or sliding stem. A weld fitting seals on the weld itself, and a VCR metal gasket face seal gives a removable all-metal joint.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Materials, finishes and ordering<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">Bodies come in SS316L, ASTM A479 bar or SS316L VAR; diaphragms are SS316L or Hastelloy C-22. Seats are PCTFE, PFA or Vespe, which set the pressure rating and the temperature window.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Three finish grades are offered: BA at Ra 0.25 um (10 uin.), EP at Ra 0.13 um (5 uin.), and SEP on SS316L VAR bodies. Weld fittings have flow passages electropolished to Ra 0.25 um (10 uin.).<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>Standards referenced:<\/strong> SS316L VAR body material grade referenced to SEMI F20-0305; Wetted surface condition referenced to SEMI F19 practice where requested; Pressure ratings referenced to ASME B31.3 practice at the stated temperature.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>Typical duties:<\/strong> Fab bulk specialty gas and precursor delivery panels; Process tool gas sticks and valve manifold boxes; VCR and welded analyser and sampling systems; UHP nitrogen, argon, helium and hydrogen distribution; High-purity chemical and slurry delivery lines; Gas cabinets and cylinder change-out stations.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Recommended product families<\/h2>\n\n\n\n<ul class=\"wp-block-list\">\n<li><a href=\"\/index.php\/products\/valves\/needle-valves\/\">Needle Valves<\/a><\/li>\n\n<li><a href=\"\/index.php\/products\/valves\/ball-valves\/\">Ball Valves<\/a><\/li>\n\n<li><a href=\"\/index.php\/products\/valves\/gauge-valves-manifolds\/\">Gauge Valves &amp; Manifolds<\/a><\/li>\n\n<li><a href=\"\/index.php\/products\/tube-fittings\/double-ferrule-fittings\/\">Double Ferrule Fittings<\/a><\/li>\n\n<li><a href=\"\/index.php\/products\/fluid-control-accessories\/hoses-hose-fittings\/\">Hose Assemblies<\/a><\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">Frequently asked questions<\/h2>\n\n\n\n<details class=\"wp-block-details is-layout-flow wp-block-details-is-layout-flow\"><summary>What is your minimum order quantity and lead time?<\/summary>\n<p class=\"wp-block-paragraph\">Standard catalogue items are quoted per line item, so UHP diaphragm valves, weld fittings, filters and regulators can share one consignment, and small trial quantities are accepted. Lead time depends on finish grade, seat material and whether the body is SS316L or SS316L VAR.<\/p>\n<\/details>\n\n\n\n<details class=\"wp-block-details is-layout-flow wp-block-details-is-layout-flow\"><summary>Which documents can you supply with a high-purity order?<\/summary>\n<p class=\"wp-block-paragraph\">Material certificates for the wetted parts and dimensional inspection reports ship on request. Test records, including the helium leak test result where the product is leak tested, and surface roughness records for electropolished parts are confirmed at enquiry. Certificate of origin is provided.<\/p>\n<\/details>\n\n\n\n<details class=\"wp-block-details is-layout-flow wp-block-details-is-layout-flow\"><summary>How do I choose between BA, EP and SEP finishes?<\/summary>\n<p class=\"wp-block-paragraph\">Match the finish to the cleanliness class your process requires. BA at Ra 0.25 um (10 uin.) suits general high-purity gas panels. EP at Ra 0.13 um (5 uin.) is where particle, moisture and outgassing limits are tight. SEP: SS316L VAR bodies.<\/p>\n<\/details>\n<\/div>\n\n\n\n<div class=\"wp-block-group alignfull rlok-cta has-global-padding is-layout-constrained wp-container-core-group-is-layout-c4390f02 wp-block-group-is-layout-constrained\" style=\"border-radius:0px\">\n<div class=\"wp-block-group has-global-padding is-layout-constrained wp-container-core-group-is-layout-b097105c wp-block-group-is-layout-constrained\" style=\"border-radius:0px\">\n<h2 class=\"wp-block-heading\">Request a quote or technical clarification<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">Send us the model, size, material and quantity you need &mdash; or a photo of the existing part. We reply with a quotation, availability and the applicable documents, usually within one working day.<\/p>\n\n\n\n<div class=\"wp-block-buttons is-layout-flex wp-block-buttons-is-layout-flex\">\n<div class=\"wp-block-button\"><a class=\"wp-block-button__link wp-element-button\" href=\"mailto:nimo@runda-hitech.com\">Email nimo@runda-hitech.com<\/a><\/div>\n\n<div class=\"wp-block-button is-style-outline\"><a class=\"wp-block-button__link wp-element-button\" href=\"https:\/\/wa.me\/8613657416007\">WhatsApp +86 136 5741 6007<\/a><\/div>\n<\/div>\n\n\n\n<p class=\"wp-block-paragraph\">Tel \/ WhatsApp: +86 136 5741 6007 &middot; Email: nimo@runda-hitech.com<\/p>\n<\/div>\n<\/div>\n\n\n\n<style>img{max-width:100%;height:auto}.wp-block-table{max-width:100%}.rlok-bc{display:block;font-size:13px;letter-spacing:.01em;color:#5a6b7d;margin:0 0 26px}.rlok-bc a{color:#0b2545;text-decoration:none}.rlok-bc a:hover{color:#c8102e;text-decoration:underline}.rlok-bc strong{color:#0b2545}.rlok-fallback-nav{display:block;border-bottom:1px solid #dde3ea;padding-bottom:12px;margin:0 0 18px;font-size:14.5px;font-weight:600}.rlok-fallback-nav a{color:#0b2545;text-decoration:none}.rlok-fallback-nav a:hover{color:#c8102e;text-decoration:underline}@media (max-width:782px){.rlok-hero{min-height:330px!important;padding-left:18px!important;padding-right:18px!important}.rlok-hero h1{font-size:26px;line-height:1.22}.rlok-hero p{font-size:15.5px}.rlok-body{padding:30px 18px 12px!important}.rlok-cta{padding:38px 18px!important}.rlok-cta h2{font-size:22px}.rlok-bc{font-size:12.5px;margin-bottom:18px}.wp-block-table{display:block;overflow-x:auto;-webkit-overflow-scrolling:touch}.wp-block-table table{min-width:520px;font-size:13px}.wp-block-table th,.wp-block-table td{padding:7px 9px}.wp-block-columns{gap:1.1rem;margin-bottom:1.3rem}.wp-block-button{width:100%}.wp-block-button__link{width:100%;text-align:center}h2.wp-block-heading{font-size:22px}h3.wp-block-heading{font-size:19px}.wp-block-details{padding:12px 14px}}<\/style><script type=\"application\/ld+json\">{\"@context\": \"https:\/\/schema.org\", \"@type\": \"BreadcrumbList\", \"itemListElement\": [{\"@type\": \"ListItem\", \"position\": 1, \"name\": \"Home\", \"item\": \"http:\/\/runda-hitech.com\/\"}, {\"@type\": \"ListItem\", \"position\": 2, \"name\": \"Applications\", \"item\": \"http:\/\/runda-hitech.com\/applications\/\"}, {\"@type\": \"ListItem\", \"position\": 3, \"name\": \"Semiconductor\", \"item\": \"http:\/\/runda-hitech.com\/applications\/semiconductor\/\"}]}<\/script>\n\n\n<!-- VERIFY BEFORE PUBLISHING: Confirm that RUNDA is presented as a supplier and sourcing partner for these components, not as the manufacturer; no production claim appears on this page and none should be added without confirmation. | Confirm which specific standards may be cited for the high-purity range. SEMI F20-0305 is quoted in the supplier catalogue for SS316L VAR material, and SEMI F19 and ASME BPE are used here only as surface-condition and weld-preparation references; the owner must confirm that the supplier can document compliance before these lines are published. | Confirm whether every UHP diaphragm valve is helium leak tested to 1 x 10\u207b\u2079 std cm\u00b3\/s and whether RUNDA holds the test record or relies on the upstream supplier's certificate. | Confirm the availability of the SEP finish grade and of Ra 0.13 \u00b5m (0.13 micron) electropolishing for all port sizes, and whether double-layer cleanroom bagging is provided in-house or outsourced. | Confirm what cleanliness specification (particle count, moisture level or NVR limit) can actually be stated for semiconductor orders; no numeric cleanliness class should be published until the cleaning route is verified. | Confirm that material certificates for wetted parts and dimensional inspection reports can be issued for every high-purity shipment, and in which format (for example EN 10204 3.1). | Confirm the Vespe seat designation and its temperature limit of 350 \u00b0F (177 \u00b0C), which is carried over from the supplier catalogue and should be checked against the current revision. | Confirm whether the semiconductor wording about fab gas systems, tool gas sticks and manifold boxes reflects actual project experience, or should be softened to general high-purity industrial gas service. -->\n\n<!-- build: slug=semiconductor type=industry keywords=high purity gas components supplier, UHP diaphragm valve semiconductor, SS316L VAR diaphragm valve supplier, high purity weld fittings 316L export, VCR gasket face seal fittings supplier, semiconductor gas panel tube fittings China, electropolished fittings Ra 0.13, helium leak tight diaphragm valve 1e-9, high purity gas filter 0.5 micron, specialty gas regulator SS316L, ultra high purity gas stick components exporter, semiconductor grade tube fittings procurement -->","protected":false},"excerpt":{"rendered":"<p>UHP diaphragm valves, weld fittings, regulators and filters for semiconductor gas and chemical lines, 1\/4\u20133\/4 in, 3,000 psig. Request a quote.<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":28,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-74","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/runda-hitech.com\/index.php\/wp-json\/wp\/v2\/pages\/74","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/runda-hitech.com\/index.php\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/runda-hitech.com\/index.php\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/runda-hitech.com\/index.php\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/runda-hitech.com\/index.php\/wp-json\/wp\/v2\/comments?post=74"}],"version-history":[{"count":9,"href":"https:\/\/runda-hitech.com\/index.php\/wp-json\/wp\/v2\/pages\/74\/revisions"}],"predecessor-version":[{"id":427,"href":"https:\/\/runda-hitech.com\/index.php\/wp-json\/wp\/v2\/pages\/74\/revisions\/427"}],"up":[{"embeddable":true,"href":"https:\/\/runda-hitech.com\/index.php\/wp-json\/wp\/v2\/pages\/28"}],"wp:attachment":[{"href":"https:\/\/runda-hitech.com\/index.php\/wp-json\/wp\/v2\/media?parent=74"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}