Semiconductor & High-Purity Gas Valves
High-purity systems carry nitrogen, argon, helium, hydrogen, specialty gases and process chemicals from bulk supply to the point of use without adding particles, moisture or hydrocarbons. R-LOK supplies UHP diaphragm valves in SS316L and SS316L VAR, weld fittings, VCR gasket face seal connectors, regulators and sintered stainless filters. Passages are electropolished to Ra 0.13 um (5 uin.); valves are rated to 3,000 psig (207 bar).
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Key features
- UHP diaphragm valves rated to 3,000 psig (207 bar) with metal diaphragm isolation.
- Bodies in SS316L, ASTM A479 bar or SS316L VAR to SEMI F20-0305.
- Finishes BA Ra 0.25 um (10 uin.) and EP Ra 0.13 um (5 uin.)
- Leakage 1 x 10^-9 std cm^3/s helium, internal and external.
- Filter pore grades 0.5, 2, 7, 15, 60 and 90 micron.
- RH regulators: SS316L body, 10 um inlet screen, 500 to 6,000 psig.
Specifications
| Parameter | Value |
|---|---|
| Product scope | UHP diaphragm valves and manifolds, weld fittings, VCR connectors, regulators, inline filters |
| End connections | VCR thread, GBO-LOK compression fitting, tube butt weld, NPT per ASME B1.20.1 |
| Diaphragm valve sizes | 1/4 in, 3/8 in and 1/2 in (6-12 mm); LD series also 3/4 in |
| Diaphragm valve pressure | LD to 250 psig (17.2 bar); HD to 3,000 psig (207 bar) by series |
| Weld fitting sizes | 1/8 in to 1 in (6-18 mm) tube outside diameter, imperial and metric tables |
| Weld fitting pressure | 8,500 psi (586 bar) at 0.028 in wall; 3,700 psi (254 bar) at 0.049 in wall; 2,400 psi (165 bar) on 3/4 in and 1 in |
| Materials and seats | bodies SS316L, ASTM A479 or VAR; diaphragms SS316L or Hastelloy C-22; seats PCTFE, PFA or Vespe |
| Seat temperature | PCTFE -40 to 176 F (-40 to 80 C); PFA and Vespe to 350 F (177 C) |
Where it is used
A fab gas system is a chain of pressure and purity stages: panel, distribution tubing, valve manifold box or gas cabinet, then the tool gas stick that feeds the process chamber. A regulator drops the pressure there and a filter removes particulate.
Every joint is a potential particle source. High-purity systems use welded tubing runs, metal gasket face seals at joints reopened for maintenance, and diaphragm valves. R-LOK supplies UHP components for all these stages, from 1/4 in to 3/4 in (6-12 mm) port sizes.
How to specify it
Pressure rating is not the deciding factor. Two valves of the same size and the same 316L body can differ by an order of magnitude in particles released, internal volume, and leak rate after thermal cycling.
A diaphragm valve presses a flexible metal diaphragm onto a seat enclosed in the body. The media never touches a packing or sliding stem. A weld fitting seals on the weld itself, and a VCR metal gasket face seal gives a removable all-metal joint.
Materials, finishes and ordering
Bodies come in SS316L, ASTM A479 bar or SS316L VAR; diaphragms are SS316L or Hastelloy C-22. Seats are PCTFE, PFA or Vespe, which set the pressure rating and the temperature window.
Three finish grades are offered: BA at Ra 0.25 um (10 uin.), EP at Ra 0.13 um (5 uin.), and SEP on SS316L VAR bodies. Weld fittings have flow passages electropolished to Ra 0.25 um (10 uin.).
Standards referenced: SS316L VAR body material grade referenced to SEMI F20-0305; Wetted surface condition referenced to SEMI F19 practice where requested; Pressure ratings referenced to ASME B31.3 practice at the stated temperature.
Typical duties: Fab bulk specialty gas and precursor delivery panels; Process tool gas sticks and valve manifold boxes; VCR and welded analyser and sampling systems; UHP nitrogen, argon, helium and hydrogen distribution; High-purity chemical and slurry delivery lines; Gas cabinets and cylinder change-out stations.
Recommended product families
Frequently asked questions
What is your minimum order quantity and lead time?
Standard catalogue items are quoted per line item, so UHP diaphragm valves, weld fittings, filters and regulators can share one consignment, and small trial quantities are accepted. Lead time depends on finish grade, seat material and whether the body is SS316L or SS316L VAR.
Which documents can you supply with a high-purity order?
Material certificates for the wetted parts and dimensional inspection reports ship on request. Test records, including the helium leak test result where the product is leak tested, and surface roughness records for electropolished parts are confirmed at enquiry. Certificate of origin is provided.
How do I choose between BA, EP and SEP finishes?
Match the finish to the cleanliness class your process requires. BA at Ra 0.25 um (10 uin.) suits general high-purity gas panels. EP at Ra 0.13 um (5 uin.) is where particle, moisture and outgassing limits are tight. SEP: SS316L VAR bodies.
Request a quote or technical clarification
Send us the model, size, material and quantity you need — or a photo of the existing part. We reply with a quotation, availability and the applicable documents, usually within one working day.
Tel / WhatsApp: +86 136 5741 6007 · Email: nimo@runda-hitech.com